Japan Intellectual Property Rights: MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURES FOR BACKSIDE PROCESSING

Japan, July 27 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURES FOR BACKSIDE PROCESSING.' Other related details are as follows:

Application Number: JP,2025-007417

Category (FI): C23C16/50,H01L21/318@B,H01L21/31@C,H01L21/316@X,H10P14/694@B,H10P14/692@X,H10P14/60,101@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 20, 2025

Publication Date: April 15, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.