Japan, Jan. 16 -- APPLIED MATERIALS INC has got intellectual property rights for 'PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS.' Other related details are as follows:
Application Number: JP,2024-062825
Category (FI): C23C14/50@D,C23C14/50@E,C23C16/458,C23C16/46,H01L21/205,H01L21/31@C,H01L21/68@N,H10P14/24,H10P14/60,101@C,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 9, 2024
Publication Date: July 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
