Japan, Jan. 16 -- TOPPAN PRINTING CO LTD has got intellectual property rights for 'PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND PRODUCTION METHOD OF PHASE SHIFT MASK.' Other related details are as follows:
Application Number: JP,2020-150758
Category (FI): G03F1/32,G03F1/48
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 8, 2020
Publication Date: March 18, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
