Japan, June 16 -- CANON INC has got intellectual property rights for 'PLANARIZATION METHOD, PLANARIZATION SYSTEM, AND METHOD OF MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-054318
Category (FI): H01L21/30,502@D,H01L21/30,578,B29C59/02@Z,H10P76/00,578,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 29, 2022
Publication Date: Dec. 8, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
