Japan, Nov. 6 -- CANON INC has got intellectual property rights for 'PLANARIZATION PROCESS, APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-148411
Category (FI): B29C59/02@Z,H01L21/30,502@D,H10P76/00,578,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 16, 2022
Publication Date: July 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
