Japan, Jan. 16 -- ASM IP HOLDING BV has got intellectual property rights for 'PLASMA DEVICE SUSCEPTOR ASSEMBLY.' Other related details are as follows:
Application Number: JP,2021-147839
Category (FI): C23C16/458,C23C16/50,H01L21/302,101@G,H01L21/31@C,H01L21/68@R,H05H1/46@M,H10P14/60,101@C,H10P50/20,101@G,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: Sept. 10, 2021
Publication Date: March 25, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
