Japan, Nov. 4 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING DEVICE AND SUBSTRATE SUPPORTER.' Other related details are as follows:
Application Number: JP,2025-060884
Category (FI): H05H1/46@M,H10P72/72,H10P50/20,101@G,H01L21/68@R,H01L21/302,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 2, 2025
Publication Date: June 19, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
