Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-152372
Category (FI): H05H1/46@A,H10P50/20,101@H,H10P14/60,101@C,H01L21/302,101@H,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 26, 2022
Publication Date: April 10, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
