Japan, July 14 -- KOMIYAMA ELECTRON CO LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS, AND PLASMA TREATMENT METHOD.' Other related details are as follows:
Application Number: JP,2020-181110
Category (FI): H05H1/46@A,C23C14/02@A
Stage: PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus and plasma treatment method capable of improving wettability of a surface of a resin to enhance adhesion of the resin.SOLUTION: A plasma treatment apparatus that irradiates a surface of a resin 1 with plasma to improve wettability of the surface includes a holding unit 4 to hold the resin 1, a moving unit 5 attached to the holding unit 4 to reciprocate the holding unit 4 along a predetermined moving direction, a gas introducing unit to introduce a gas into a chamber, the gas for desorbing and/or adsorbing at least a part of atoms constituting the resin 1 from the surface of the resin 1, and a plasma generating unit 3 to convert the introduced gas to plasma and to irradiate the surface of the resin. The plasma irradiation direction P is set oblique to the moving direction A of the moving unit 5.SELECTED DRAWING: Figure 2 (Grant)
Filing Date: Oct. 29, 2020
Publication Date: May 17, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
