Japan, Jan. 23 -- NISSIN ELECTRIC CO LTD has got intellectual property rights for 'PLASMA TREATMENT APPARATUS.' Other related details are as follows:
Application Number: JP,2021-105896
Category (FI): C23C16/46,C23C16/505,H01L21/302,101@C,H01L21/31@C,H05H1/46@L,H10P14/60,101@C,H10P50/20,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 25, 2021
Publication Date: Jan. 17, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
