Japan, Jan. 23 -- SYNPOWER CO LTD has got intellectual property rights for 'POLISHING PAD DETECTION APPARATUS, SYSTEM FOR DETECTING POLISHING PAD, AND METHOD FOR DETECTING POLISHING PAD.' Other related details are as follows:
Application Number: JP,2024-059285
Category (FI): G01N21/17@A,H10P52/40,H10P52/00@D,H01L21/304,622@F
Stage: Grant (IP right document published.)
Filing Date: April 2, 2024
Publication Date: Oct. 15, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
