Japan, Nov. 10 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING.' Other related details are as follows:
Application Number: JP,2024-020735
Category (FI): C23C16/458
Stage: Grant (IP right document published.)
Filing Date: Feb. 15, 2024
Publication Date: April 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
