Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PROCESSING DEVICE AND ALIGNMENT METHOD.' Other related details are as follows:
Application Number: JP,2023-004312
Category (FI): H10P72/50@K,H10P72/50@F,H01L21/68@F,H01L21/68@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 16, 2023
Publication Date: July 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
