Japan, Oct. 5 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'PROCESSING LIQUID SUPPLY DEVICE AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-206623
Category (FI): H10P70/00,103@A,H01L21/304,648@K,H10P70/00,108@K,H01L21/304,643@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 23, 2022
Publication Date: July 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
