Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'PROCESSING METHOD AND PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-190509
Category (FI): H10P50/20,201@A,H10P50/28,H01L21/302,201@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 29, 2022
Publication Date: June 10, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
