Japan, Nov. 4 -- CARL ZEISS SMT GMBH has got intellectual property rights for 'PROJECTION EXPOSURE APPARATUS, AND METHOD FOR DESIGNING COMPONENT OF PROJECTION EXPOSURE APPARATUS.' Other related details are as follows:
Application Number: JP,2025-115603
Category (FI): G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 9, 2025
Publication Date: Oct. 7, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
