Japan, July 27 -- ENTEGRIS INC has got intellectual property rights for 'PURGE FLOW DISTRIBUTION SYSTEM FOR SUBSTRATE CONTAINER AND METHOD FOR IMPLEMENTING PURGE FLOW DISTRIBUTION SYSTEM.' Other related details are as follows:
Application Number: JP,2024-102691
Category (FI): H01L21/68@T,H10P72/10@T
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 26, 2024
Publication Date: Oct. 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
