Japan Intellectual Property Rights: RADICAL SUPPLY DEVICE, RADICAL PROCESSING DEVICE, RADICAL GENERATION METHOD, AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'RADICAL SUPPLY DEVICE, RADICAL PROCESSING DEVICE, RADICAL GENERATION METHOD, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-112230

Category (FI): C23C16/06,C23C16/50,H01L21/31@C,H10P14/60,101@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 13, 2022

Publication Date: Jan. 25, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.