Japan Intellectual Property Rights: REACTION TUBE TRANSPORT JIG AND REACTION TUBE TRANSPORT METHOD

Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'REACTION TUBE TRANSPORT JIG AND REACTION TUBE TRANSPORT METHOD.' Other related details are as follows:

Application Number: JP,2022-065846

Category (FI): H01L21/02@Z,H01L21/31@F,H10P14/60,101@F,H10P95/00,201@Z

Stage: Grant (IP right document published.)

Filing Date: April 12, 2022

Publication Date: Oct. 24, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.