Japan, Jan. 16 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'REFLECTION-TYPE MASK BLANK.' Other related details are as follows:
Application Number: JP,2022-204297
Category (FI): C23C14/06@N,G03F1/24,G03F1/48,G03F1/54
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 21, 2022
Publication Date: July 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
