Japan, Aug. 18 -- KLA CORP has got intellectual property rights for 'SCANNING SCATTEROMETRY OVERLAY MEASUREMENT.' Other related details are as follows:
Application Number: JP,2025-024749
Category (FI): H01L21/66@J,H10P74/20@J,G01N21/956@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 19, 2025
Publication Date: May 27, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
