Japan, Jan. 21 -- TANAKA KIKINZOKU KOGYO KK has got intellectual property rights for 'SELECTIVE FILM DEPOSITION METHOD OF Ru THIN FILM.' Other related details are as follows:
Application Number: JP,2024-045784
Category (FI): H10D64/60,H01L21/285@C,H01L21/28,301@R,C23C16/06,H10P14/43,C23C16/04
Stage: Grant (IP right document published.)
Filing Date: March 21, 2024
Publication Date: Oct. 3, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
