Japan, Jan. 21 -- AMAYA CORP has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-160884
Category (FI): C30B33/02,H10P72/78,H01L21/68@P,C23C16/40,H10P14/60,101@B,H01L21/31@B
Stage: Grant (IP right document published.)
Filing Date: Sept. 18, 2024
Publication Date: Sept. 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
