Japan, July 27 -- NGK INSULATORS LTD has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING EQUIPMENT MEMBER AND REGENERATION METHOD THEREOF.' Other related details are as follows:
Application Number: JP,2024-058062
Category (FI): H10P72/72,H01L21/68@R,H01L21/302,101@G,C04B37/00@Z,H01L21/31@C,H02N13/00@D,H05B3/74,H10P14/60,101@C,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 29, 2024
Publication Date: Oct. 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
