Japan, Nov. 4 -- CANON INC has got intellectual property rights for 'STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-144371
Category (FI): G03F7/20,501,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 12, 2022
Publication Date: March 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
