Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STRESS REDUCTION METHOD.' Other related details are as follows:
Application Number: JP,2022-006197
Category (FI): C23C16/14,C23C16/455
Stage: Grant (IP right document published.)
Filing Date: Jan. 19, 2022
Publication Date: July 31, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
