Japan Intellectual Property Rights: SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

Japan, April 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD.' Other related details are as follows:

Application Number: JP,2022-207536

Category (FI): H10P70/00,104@E,H10P70/00,108@G,H10P70/00,108@K,H01L21/304,648@G,H01L21/304,644@E,H01L21/304,648@K,H01L21/304,643@A,H10P70/00,103@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 23, 2022

Publication Date: July 4, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.