Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE CONVEYING DEVICE.' Other related details are as follows:

Application Number: JP,2024-106614

Category (FI): H10P72/30@A,H01L21/68@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 2, 2024

Publication Date: Sept. 5, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.