Japan Intellectual Property Rights: SUBSTRATE DRYING DEVICE AND SUBSTRATE PROCESSING DEVICE

Japan, Oct. 30 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'SUBSTRATE DRYING DEVICE AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2025-132308

Category (FI): H01L21/304,651@M,H01L21/304,651@B,H01L21/304,648@A,F26B3/28,F26B5/08,H10P70/00,201@M,H10P70/00,201@B,H10P70/00,108@A,F26B23/04@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 7, 2025

Publication Date: Oct. 28, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.