Japan Intellectual Property Rights: SUBSTRATE HANDLING IN MODULAR POLISHING SYSTEM WITH SINGLE SUBSTRATE CLEANING CHAMBER

Japan, Jan. 16 -- APPLIED MATERIALS INC has got intellectual property rights for 'SUBSTRATE HANDLING IN MODULAR POLISHING SYSTEM WITH SINGLE SUBSTRATE CLEANING CHAMBER.' Other related details are as follows:

Application Number: JP,2024-107139

Category (FI): B24B41/06@A,B24B55/06,H01L21/304,621@D,H01L21/304,622@G,H01L21/304,648@A,H01L21/304,651@B,H01L21/68@N,H10P52/00@E,H10P52/00@K,H10P70/00,108@A,H10P70/00,201@B,H10P72/70

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 3, 2024

Publication Date: Dec. 10, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.