Japan Intellectual Property Rights: SUBSTRATE HOLDING DEVICE AND SUBSTRATE PROCESSING SYSTEM

Japan, Jan. 15 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE HOLDING DEVICE AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-021230

Category (FI): B05C11/08,B05C13/02,H01L21/30,564@C,H01L21/30,569@C,H01L21/304,643@A,H01L21/304,648@Z,H01L21/68@N,H10P70/00,103@A,H10P70/00,108@Z,H10P72/70,H10P76/00,564@C,H10P76/00,569@C

Stage: Grant (IP right document published.)

Filing Date: Feb. 15, 2022

Publication Date: Aug. 25, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.