Japan, Oct. 5 -- CANON TOKKI CORP has got intellectual property rights for 'SUBSTRATE INSPECTION DEVICE, AND DEPOSITION DEVICE.' Other related details are as follows:
Application Number: JP,2022-097318
Category (FI): C23C14/52,G01N21/956@Z,G01N21/958,H01L21/68@A,H01L27/32,H05B33/02,H05B33/14@A,H10K50/10,H10K50/80,H10K59/00,H10K59/10,H10K59/80,H10K71/00,H10K71/16,H10K71/70,H10K71/80,H10K77/10,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 16, 2022
Publication Date: Dec. 28, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
