Japan, Nov. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE INSPECTION DEVICE, SUBSTRATE INSPECTION METHOD, AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2021-097785
Category (FI): G01N21/956@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 11, 2021
Publication Date: Dec. 22, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
