Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, PROCESS LIQUID SUPPLY METHOD, AND COMPUTER STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2021-206828
Category (FI): B05C11/08,H01L21/30,564@C,H10P76/00,564@C,H10P76/20
Stage: Grant (IP right document published.)
Filing Date: Dec. 21, 2021
Publication Date: July 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
