Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, PROGRAM AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2025-085773
Category (FI): B23K26/53,H01L21/304,601@Z,H10P52/00@R,H10P54/20,201,H10P54/30,H10P54/50,H10P95/60@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 22, 2025
Publication Date: Sept. 2, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
