Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-178447
Category (FI): H10P14/60,101@C,H10P14/692@X,C23C16/52,H01L21/316@X,H01L21/31@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 7, 2022
Publication Date: May 17, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
