Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 5 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2025-038525

Category (FI): H01L21/304,621@E,H01L21/304,642@E,H10P70/00,103@A,H01L21/304,648@L,H10P70/00,108@K,H01L21/304,648@K,H10P70/00,102@E,H01L21/304,643@A,H01L21/304,644@B,H10P70/00,102@D,H01L21/304,642@D,H10P52/00@Y,H10P52/00@T,H10P52/00@R,H10P70/00,108@L,H10P70/00,104@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 11, 2025

Publication Date: Feb. 10

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.