Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 5 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-191750

Category (FI): H01L21/304,643@A,H10P72/30@A,H10P70/00,108@A,H10P70/00,107@Z,H10P70/00,104@A,H10P70/00,103@C,H10P70/00,103@A,H10P70/00,102@A,H10P50/68@B,H01L21/68@A,H01L21/306@E,H01L21/304,644@A,H01L21/304,647@Z,H01L21/304,643@C,H01L21/304,648@A,H01L21/304,642@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 30, 2022

Publication Date: June 11, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.