Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 21 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2024-191036

Category (FI): H01L21/308@F,H10P50/60@R,H10P50/66,H10P70/00,103@A,H10P70/00,103@C,H10P70/00,108@G,H01L21/304,643@A,H01L21/304,643@C,H01L21/304,648@G,H01L21/306@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 30, 2024

Publication Date: May 15

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.