Japan, Oct. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:
Application Number: JP,2022-151212
Category (FI): H01L21/02@Z,H01L21/26@G,H10P34/00@G,H10P95/00,102@B,H10P95/00,102@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 22, 2022
Publication Date: April 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
