Japan, March 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-031761
Category (FI): H01L21/316@A,H01L21/31@C,H10P14/60,101@C,H10P14/692@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 2, 2022
Publication Date: Sept. 14, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
