Japan, Sept. 9 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-141780
Category (FI): H01L21/306@R,H01L21/306@J,H10P50/60@R,H10P50/60@J
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 23, 2024
Publication Date: March 6
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
