Japan, Nov. 11 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2023-031373
Category (FI): H01L21/31@B,H01L21/318@B,C23C16/455,H01L21/316@X,C23C16/46
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 1, 2023
Publication Date: Sept. 12, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
