Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-025799

Category (FI): H01L21/02@Z,H01L21/30,562,H01L21/304,643@A,H01L21/304,648@Z,H10P70/00,103@A,H10P70/00,108@Z,H10P76/00,562,H10P95/00,102@A,H10P95/00,102@B,H10P95/00,102@C

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 22, 2022

Publication Date: Sept. 1, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.