Japan, Oct. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND LEAK DETERMINATION METHOD THEREOF.' Other related details are as follows:
Application Number: JP,2022-142886
Category (FI): H01L21/26@G,H10P34/00@G,H10P30/28@J,G01M3/26@N,H01L21/265,602@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 8, 2022
Publication Date: March 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
