Japan, Jan. 23 -- CANON INC has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-030181
Category (FI): H01L21/02@Z
Stage: Grant (IP right document published.)
Filing Date: Feb. 28, 2022
Publication Date: Sept. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
