Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND MONITORING METHOD IN THE SAME

Japan, Sept. 9 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND MONITORING METHOD IN THE SAME.' Other related details are as follows:

Application Number: JP,2022-029224

Category (FI): H01L21/304,642@A,H01L21/306@J,H01L21/304,648@Z,H10P70/00,108@Z,H10P70/00,102@A,H10P50/60@J

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 28, 2022

Publication Date: Sept. 7, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.