Japan, April 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND POSITION ADJUSTMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-093154
Category (FI): B23K26/02@A,B23K26/03,B23K26/08@D,H01L21/02@C,H01L21/304,601@Z,H01L21/68@F,H10P10/00@F,H10P52/00@T,H10P54/20,201,H10P72/50@F,H10P95/60@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 8, 2022
Publication Date: Dec. 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
