Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, Jan. 23 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-141877

Category (FI): H01L21/304,648@G,H01L21/306@J,H01L21/304,642@A,H10P70/00,108@G,H10P50/60@J,H10P70/00,102@A

Stage: Grant (IP right document published.)

Filing Date: Sept. 7, 2022

Publication Date: March 19, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.