Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, Aug. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-180197

Category (FI): H01L21/52@D,H01L21/52@F,H01L21/60,311,H01L21/60,311@T,H10W72/00,101@T,H10W72/00,101@Z,H10W72/30@D,H10W72/30@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 10, 2022

Publication Date: May 22, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.